DEVICE FOR THERMOCHEMICAL TREATMENT OF PARTS IN NON-SELF-MAINTAINED GLOW DISCHARGE Russian patent published in 2015 - IPC C23C8/36 C23C14/48 

FIELD: electricity.

SUBSTANCE: device for thermochemical treatment of parts in non-self-maintained glow discharge comprises vacuum chamber and substrate for placement of parts, power supply source connected by negative pole to the substrate and by positive pole to the chamber body, thermionic-emission electrode, the second power supply source connected by negative pole to thermionic-emission electrode and by its positive pole to the chamber body, hollow cylindrical electrode having inner diameter exceeding geometrical dimensions of the treated part, and thermionic-emission electrode placed coaxially to the cylindrical electrode. Device comprises additional hollow cylindrical electrode placed coaxially to the first one and forming electrostatic lens with the first electrode. Symmetry axis of hollow cylindrical electrodes is oriented under angle equal to maximum angle of ion flow incidence to the treated part surface. Thermionic-emission electrode is placed at focus of electrostatic lens.

EFFECT: improved fatigue range for parts and reduced energy costs for thermochemical treatment.

1 dwg