FIELD: measurement equipment.
SUBSTANCE: invention relates to gas analysis and may be used to control toxic and explosive gases and in these areas of science and engineering, where analysis of gas media is required. A semiconductor sensitive element according to the invention represents an isolating substrate with previously applied contacts, on which, by application of a film-forming water-alcohol solution SnCl2 with carbon nanotubes they form a layer of nanocomposite of tin dioxide. The sensitive element manufactured in this manner is exposed to drying for 10 minutes at 150°C with subsequent stabilising annealing on air for 30 minutes at temperature of not below 370°C for formation of the nanocrystalline structure.
EFFECT: invention is aimed at increasing value of gas sensitivity and selectivity of a sensor element.
2 cl, 1 dwg
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