GAS ANALYTICAL MULTISENSOR CHIP BASED ON GRAPHENE MODIFIED WITH NOBLE METAL NANOPARTICLES, AND METHOD OF ITS PRODUCTION Russian patent published in 2024 - IPC G01N27/12 

FIELD: measurement.

SUBSTANCE: use for production of gas sensors and gas analytical multisensor micro-arrays of chemoresistive type. Essence of the invention consists in the fact that the gas analytical multisensor chip includes a dielectric substrate, located on the substrate coplanar strip electrodes, thermistors and heaters, wherein at least part of surface of electrodes and substrate between electrodes is coated with gas-sensitive layer, in which at room temperature resistance changes under the effect of organic vapours or water vapours in ambient air, wherein the gas-sensitive layer is formed by at least two segments made from a reduced graphene oxide-based composite, on the surface of which nanoparticles of one of the noble metals are immobilized, selected from a group comprising gold (Au), platinum (Pt), palladium (Pd) with particle size from 5 nm to 50 nm and a distance between individual nanoparticles or clusters thereof of not less than 5 nm and not more than 50 nm, wherein gas-sensitive layer segments feature varying thickness varying from 5 nm to 350 nm.

EFFECT: providing the possibility of increasing the sensitivity and selectivity of detecting gases.

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