FIELD: physics.
SUBSTANCE: invention relates to obtaining a fullerene-containing film on a substrate and can be used in micro- and nanoelectronics. A tubular beam of electrons in the form of a ring is projected on a target which is in the form of a tablet of a powdered fullerene mixture with its coaxial envelope. Vacuum evaporation of the tablet is carried out at a temperature higher than 1.7·103 K to reduce the annular projection of the electron beam in 0.1-1 s into a spot at the centre of the tablet and condense fullerene vapour on the substrate.
EFFECT: providing the maximum utilisation factor of evaporated material and enabling deposition of coatings on large areas.
2 cl, 3 dwg, 1 ex
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