FIELD: physics.
SUBSTANCE: disclosed is a light-sensitive negative polymer composition comprising (a) an epoxy group-containing compound, (b) a first onium salt containing a structure of a cationic part of formula (b1) 
, and a structure of an anionic part of formula (b2) 
, and (c) a second onium salt containing a structure of a cationic part of formula (c1) 
, and a structure of an anionic part of formula (c2) 
. The invention also discloses a thin structure obtained from said composition and a method for making said thin structure, as well as a liquid ejector head in which said thin structure is used.
EFFECT: composition reduces variability and provides excellent reproducibility of a three-dimensional shape when using a photolithographic process.
11 cl, 5 dwg, 1 tbl, 12 ex
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