LIGHT-SENSITIVE POLYMER COMPOSITION, METHODS OF STRUCTURE OBTAINING AND HEAD FOR LIQUID SUPPLY Russian patent published in 2014 - IPC G03F7/04 B05C5/00 B41J2/05 C09K3/00 

FIELD: chemistry.

SUBSTANCE: invention relates to a light-sensitive polymer composition, suitable for obtaining various microdevices for microelectromechanical systems and other systems, as well as to a method of the structure obtaining and to a head for a liquid supply. The polymer composition contains the following components: (a) epoxy resin, which can be polymerised in the presence of an acid; (b) photoacid-generating agent, which contains an onium salt, containing a structure of a cationic part, represented by formula , and a structure of an anionic part, represented by formula , and (d) one of diphenyl, naphthalene and anthracene compounds, containing one of the following compounds: The component (b) absorbs, at least, 50% of quantity of light with the wavelength of 365 nm, absorbed by the light-sensitive polymer composition. The method of the structure obtaining consists in the following: a substrate, containing a layer of the said light-sensitive polymer composition is taken and irradiated by light. After that, an irradiated part is hardened and a non-solidified part is removed. After that, a solidified part is heated at a temperature, of at least, 140 degrees Celsius to obtain the structure. The head for the liquid supply contains an element of a hole for supply, containing the hole for supply, constructed for the liquid supply. The element of the hole for supply is obtained from the product of hardening of the said light-sensitive polymer composition.

EFFECT: invention makes it possible to obtain the structure with high sensitivity and high shape correctness.

9 cl, 9 dwg, 4 tbl, 9 ex