FIELD: chemistry.
SUBSTANCE: invention relates to obtaining nanopowders of cerium disilicide and can be used for manufacturing current-conducting and resistive elements of integrated circuit. Method of electrolytic obtaining nanosized cerium disilicide powder includes synthesis of cerium disilicide from melted media in atmosphere of purified and dried argon. Synthesis is carried out from halogenide melt. As cerium source used is water-free cerium chloride, as silicon source - sodium fluorosilicate, and as solvent - equimolar mixture of potassium and sodium chlorides with the following component ratio, wt %: cerium chloride 1.0-5.0, sodium fluorosilicate 1.0-4.0, the remaining part - equimolar mixture of potassium and sodium chlorides. Process is carried out at temperature 700°C, current density 0.2 A/cm2 and electrolysis potentials relative to glass-carbon comparison electrode from -2.2 to -2.6. Target product is obtained in pure form due to good solubility of equimolar melt of potassium chloride and sodium chloride in water and solubility of formed cerium fluoride with potassium fluoride.
EFFECT: increased rate of target product synthesis from melted electrolyte.
6 dwg, 1 ex
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Authors
Dates
2015-01-20—Published
2013-09-27—Filed