METHOD OF MAKING DIFFRACTIVE OPTICAL ELEMENT Russian patent published in 2015 - IPC G02B5/18 G02B3/08 

FIELD: physics, optics.

SUBSTANCE: method can be used to make high-precision and large-size diffractive optical elements. The method includes focusing a laser beam on the surface of a light-sensitive layer of an optical workpiece, rotating said workpiece, aligning the focus of the laser beam with the axis of rotation of the workpiece, selecting the alignment point of the focus of the laser beam with the axis of rotation of the optical workpiece as the origin of the Cartesian coordinate system of a device for positioning the focused laser bream, and moving the focused laser beam on the surface of the optical workpiece in a radial direction. The method further includes recording, in the photosensitive layer of the workpiece, at least one reference structure, determining the time dependency of the drift speed of the reference structure along the axes of the Cartesian coordinate system of the device for positioning the focused laser beam and correcting, during the process of making the diffractive optical element, the distance from the coordinate of the laser beam to the axis of rotation of the optical workpiece, depending on the drift speed of the reference structure.

EFFECT: high accuracy of aligning the origin of the coordinate system with the axis of rotation of the optical workpiece during the entire production process.

10 cl, 12 dwg