METHOD OF MONITORING ERROR OF MAKING DIFFRACTION OPTICAL ELEMENTS (DOE) Russian patent published in 2016 - IPC G02B5/18 

FIELD: physics.

SUBSTANCE: method of monitoring error making diffraction optical elements consists in formation of control openings for application of coordinate marks, which are at least of two groups of periodic arrays. At that, first group of periodic arrays is applied in control openings before beginning of production of diffraction structure, and next groups of periodic arrays are applied simultaneously with its manufacture. Then measures of control marks in form of mutual displacement of first group of periodic arrays relative to next groups of periodic arrays.

EFFECT: technical result of proposed invention consists in reduction of error control of production of diffraction structure of axial and off-axis DOE in control over characteristics of coordinate marks both in radial and angular directions.

4 cl, 8 dwg