FIELD: physics; optics.
SUBSTANCE: invention relates to optical instrument making, and specifically to making diffraction optical structures and elements. The device for optical recording diffraction structures includes a base plate with an opening in which is fitted a spindle unit with a workpiece, at least two guides, a movable table with at least two sliders, fitted with aerostatic bearings and rigidly connected to each other using a connector assembly, a recording head, a radiation source, a control unit, a reflecting element, a laser interferometre unit, which is connected by a light beam with the reflecting element and radiation source, and electrically connected to the control unit, a linear motor unit, which is electrically connected to the control unit and kinematically connected to the movable table.
EFFECT: increased accuracy of micro- and nano-processing materials for making diffraction optical elements, simple design and miniaturisation of the device.
6 cl, 3 dwg
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