METHOD AND DEVICE TO PRODUCE TRISILYLAMINE Russian patent published in 2015 - IPC B01J19/00 

FIELD: process engineering.

SUBSTANCE: invention discloses the tubular flow reactor of ideal displacement with laminar flow for production of silylamines, particularly, trisilylamine from gaseous ammonia and gaseous monohalosilane. This reactor comprises first part to define the gas intake zone, second part to define reaction zone and third part defining separation zone, the latter making the zone of contact between reagents. Trisilylamine can be collected in said separation zone in collection vessel, say, cooled trap.

EFFECT: lower yield of contaminants and decomposition of silylamines.

42 cl, 10 dwg