PLANT FOR PROCESSING OF NANOCOMPOSITES IN HYDROGEN PLASMA Russian patent published in 2015 - IPC C23C14/32 C23C8/08 B82B3/00 

FIELD: process engineering.

SUBSTANCE: invention relates to treatment of materials by vacuum and plasma. Proposed plant comprises microwave kiln to accommodate quartz reactor for nanocomposites to be placed therein. Said reactor consists of a hollow cylinder of quartz glass and dielectric flanges with stems arranged at its ends with the help of vacuum sealing for connection with vacuum lines. One of said lines is intended for hydrogen feed and provided with leak while another one is intended for evacuation of microwave kiln and reactor with the help of mechanical pump. Every said flange represents a composite design and consists of outer shell, cover, seal and shaped washer of quartz glass with central bore. Outer shell is made of a hollow two-step cylinder with stem for vacuum hose and has outer thread for fitting the cover in and inner conical surface for fitting the seal in conical gap between reactor case and outer shell. Cover is arranged between outer shell end and reactor case end.

EFFECT: continuous processing.

2 cl, 2 dwg