APPARATUS FOR HYDROGEN ABSORPTION OF THIN-FILM COMPOSITES IN HYDROGEN PLASMA AND METHOD FOR HYDROGEN ABSORPTION OF THIN-FILM COMPOSITES IN HYDROGEN PLASMA USING SAME Russian patent published in 2015 - IPC C23C14/32 C23C8/08 B82B3/00 

FIELD: chemistry.

SUBSTANCE: group of inventions relates to vacuum-plasma treatment of composites. An apparatus for hydrogen absorption of thin-film composites in hydrogen plasma comprises a microwave oven and a quartz reactor inside the oven. The reactor consists of a housing in the form of a hollow cylinder and, mounted at the ends thereof, dielectric flanges with tailpieces for connection with vacuum hoses, one of which is intended for feeding hydrogen and the other for evacuating the microwave oven and the reactor. One of the flanges can be removed. Each flange consists of an envelope, a cover, a seal and a shaped spacer made of quartz glass with a centre hole. The method includes placing composites inside the reactor, evacuating the reactor and the microwave oven, feeding hydrogen into the reactor and washing the reactor and the microwave oven with the hydrogen, igniting hydrogen plasma in the reactor through microwave discharge and treating the composites with hydrogen with additional evacuation of the microwave oven during the treatment process.

EFFECT: improved conditions of exposing the composites to the plasma during continuous treatment.

2 cl, 2 dwg