METHOD OF PRODUCING MICRO- AND NANOSTRUCTURES OF SURFACE OF MATERIALS Russian patent published in 2015 - IPC H01L21/00 B82B1/00 

FIELD: physics.

SUBSTANCE: method is based on irradiating a surface with a moving laser beam in areas of the surface of the material with an absorption coefficient of not less than 3·10⁴ cm^-1 at the laser wavelength, wherein each area is irradiated using a series of laser pulses with pulse duration of not more than 30 ns, and energy density F of the laser beam in the irradiated area is set in the range F=0.005-1.0 J/cm² to enable splitting of the surface layer of the material without melting and forming on the surface of the material sub-micrometre cracks, slits and flakes with size ranging from 0.05 mcm to 0.8 mcm.

EFFECT: simplified method of producing micro- and nanostructures for a wide range of materials.

12 cl, 1 tbl, 7 dwg