APPARATUS FOR MEASURING SURFACE FORM OF THREE-DIMENSIONAL OBJECT Russian patent published in 2013 - IPC G01B9/02 G01B11/03 G01B5/12 

FIELD: physics.

SUBSTANCE: apparatus for measuring the surface form of a three-dimensional object in coordinates X, Y, Z has an array of probes, in the bottom part of which a detecting head is rigidly mounted, and in the top part there is a light-reflecting element, placed in a holder with multiple guides lying in nodes of a two-dimensional grid with known coordinates of the points of contact of detecting heads of each probe relative the centre of the holder, which enable each probe to freely move along the axis Z, wherein the two-dimensional grid can have an arbitrary geometric form. The apparatus also includes a mechanism for moving the three-dimensional object and the holder in order to calculate the surface form of the original object based on data on coordinates X, Y, Z, a computer, a flat support optical element, an optical device in form of an interferometer for measuring distance in the Z direction between the reflecting surface of the probes and the flat support optical element, having a coherent light source, an optical system which forms a wide parallel light beam whose diameter is larger than the size of the region of the two-dimensional grid, a beam splitter, a photodetector array on which an image of the light-reflecting elements from the array of probes is formed using a lens.

EFFECT: enabling measurement of the surface form of three-dimensional objects in motion and high measurement accuracy.

36 cl, 4 dwg