METHOD OF MICRO OBJECTS INVESTIGATION AND NEAR-FIELD OPTICAL MICROSCOPE FOR ITS IMPLEMENTATION Russian patent published in 2018 - IPC G01Q60/18 B82Y35/00 

FIELD: metrology.

SUBSTANCE: invention relates to the field of scanning probe microscopy and can be used in studying the microrelief of reflecting surfaces, for example, in crystallography, metrology, in the study of high molecular compounds. Said result is achieved by the fact that the method of micro-objects studying involves splitting the light flux from the source into two beams that pass through different optical paths, one of them is directed to a video observation system made in the form of a photo detector and the other is passed through a probe to a sample reflected from the surface of the sample the flow is directed through the probe and reduced together with the first one. At that, all light streams from the source to the video surveillance system are transmitted via single-mode fibers whose ends are located at a distance from the matrix photo detector, so as to provide illumination of its surface by both streams, recording the interference pattern formed on the photo detector surface by measuring the signal from each element of the photo detector matrix, the phase difference between the fluxes from the source and the probe is determined by their change, and the distance between the probe and the surface of the object under study is determined from it.

EFFECT: technical result is an increase in spatial resolution.

6 cl, 1 dwg