HIGH-FREQUENCY ELECTRON-ION MICROSCOPE Russian patent published in 2015 - IPC H01J37/26 

FIELD: physics, optics.

SUBSTANCE: invention relates to electron-ion optical systems and is intended for studying the structure of matter by illuminating the matter with a high-power stream of charged particles. The high-frequency electron-ion microscope consists of a vacuum chamber and, inside the chamber, a charged particle source, the object under investigation, an aperture diaphragm and a fluorescent screen. Outside the vacuum chamber there is a system of loops with current, the system being connected to a high-frequency current generator which generates a high-frequency axially symmetrical magnetic field having a double focusing effect and simultaneously inducing an electric field which accelerates the stream of charged particles. The vacuum chamber has shape of a section of an annular tube, at the ends of which the charged particle source and the fluorescent screen are placed. The high-frequency magnetic field simultaneously operates as an accelerator, a lens and a charged particle projector.

EFFECT: higher energy of the stream of charged particles, light-gathering power, resolution and thickness of the analysed object with smaller dimensions of the system.

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