METHOD OF OBTAINING LAYERS OF CUBIC ZIRCONIUM OXIDE Russian patent published in 2015 - IPC C23C14/08 C23C14/24 

Abstract RU 2551739 C2

FIELD: chemistry.

SUBSTANCE: invention relates to obtaining a zirconium dioxide-based layer on a substrate. Reactive arc spraying with pulse current of the spark discharge and/or application of a magnetic field, orthogonal to the spark target, is applied. To obtain the layer used is a mixed target, including elementary zirconium and at least one stabilising agent, or a zirconium target from elementary zirconium with the application of oxygen and nitrogen as a reaction gas, or the mixed target with the application of nitrogen and oxygen as the reaction gas.

EFFECT: obtaining layers based on zirconium dioxide with a cubic and/or tetragonal structure, possessing required properties, is provided.

26 cl, 26 dwg, 5 tbl

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RU 2 551 739 C2

Authors

Ramm,Jurgen

Vidrig,Beno

Dates

2015-05-27Published

2010-09-24Filed