FIELD: chemistry.
SUBSTANCE: invention relates to obtaining a zirconium dioxide-based layer on a substrate. Reactive arc spraying with pulse current of the spark discharge and/or application of a magnetic field, orthogonal to the spark target, is applied. To obtain the layer used is a mixed target, including elementary zirconium and at least one stabilising agent, or a zirconium target from elementary zirconium with the application of oxygen and nitrogen as a reaction gas, or the mixed target with the application of nitrogen and oxygen as the reaction gas.
EFFECT: obtaining layers based on zirconium dioxide with a cubic and/or tetragonal structure, possessing required properties, is provided.
26 cl, 26 dwg, 5 tbl
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Authors
Dates
2015-05-27—Published
2010-09-24—Filed