METHOD OF MASS-SPECTROMETRY BASED CONTROL OF TIGHTNESS OF MONOBLOCK GAS LASERS Russian patent published in 2015 - IPC G01M3/02 G01M11/00 H01S3/36 

FIELD: instrumentation.

SUBSTANCE: invention relates to the field of control of items tightness. The method of mass-spectrometry based control of tightness of monoblock gas lasers includes development of closed volumes at both sides of the controlled laser shell, pumping of the inner volume together with a sample gas analyser to high vacuum, accumulation in the controlled shell, connected with the analyser of sample gas by stopping of pumping of sample gas during pumping of other gases and registration of variation of background value of sample gas peak for the control time T_c, selected when reaching the linear section of sample peak value growth, which is determined until dependence of intensity of background flow of sample gas on time during adjacent measurements will not match in curvature and intensity with accuracy of up to 10%, but at least 3 times. They resume pumping of controlled volume together with the gas analyser, supply of sample gas into the external closed volume, wait for at least establishment of the stationary flow of the sample gas via defects of surfaces, connected by vacuum-tight method of optical contact, accumulation of sample gas in the controlled volume, registration of variation of summary peak of pressure of sample gas for the control time T_c by stopping of pumping from the sample gas analyser during pumping of other gases. Product tightness is assessed by difference of total and background values of the sample gas peak at the moment of time T_c. Accumulation of sample gas in the inner volume of the controlled shell is carried out with a pumping gas analyser disconnected from the controlled volume. Registration of the accumulated sample gas is carried out after time T_r, determined by laser design, sample gas and being higher than time of establishment of the stationary flow of the sample gas via defects of surfaces, at least four times.

EFFECT: technical result consists in increased percentage of leak detection, and also in increased accuracy of detection of their location.