FIELD: physics.
SUBSTANCE: method of making hollow cold cathode for a gas laser, involving making a workpiece, sputtering a emitting film on its inner surface and oxidation of said film in oxygen, in which the cathode workpiece and the emitting film are made from aluminium, the cathode undergoes thermal treatment at pressure not higher than 00133 Pa at temperature 573°K…593°K for 30…40 min, followed by step-by-step oxidation of the emitting film at normal temperature with discharge in oxygen with current density 0.15…0.9 mA/cm and oxygen pressure 40…80 Pa for 45…55 min, and then with current density 0.15…0.3 mA/cm2 and oxygen pressure 150…200 Pa for 25…35 min.
EFFECT: simplification of technique by excluding thermal oxidation, shorter processing time and reducing the need for using highly toxic beryllium.
1 tbl
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