METHOD OF CREATING ANODE OXIDE FILM OF COLD CATHODE OF GAS LASER IN DIRECT CURRENT GLOW DISCHARGE Russian patent published in 2016 - IPC H01J1/30 

FIELD: electronics.

SUBSTANCE: invention relates to quantum electronics and can be used for production of gas-discharge devices, particularly cold cathodes of one-piece gas lasers. Method of forming anode oxide film of cold cathode of gas laser in DC glow discharge, which includes assembling process device, installation of cold cathode OF gas laser and a composite anode structure on surface made on vacuum station, a vacuum density, pumping to high vacuum, filling gas, in igniting glow discharge direct current between working part of a composite anode and cold cathode, ion etching and anodic oxidation of cold cathode, training and stabilisation of operating properties of cold cathode, characterised by that after high-vacuum pumping process device filled with gaseous oxygen, cold cathode working surface is cleaned gas laser in glow discharge oxygen by means of ignition and maintaining of glow discharge between cold cathode, located at negative potential of DC voltage, and composite anode, after high-vacuum pumping process of device it is filled with inert gas with mass number not less than 20, ionic cleaning is carried out working surface of cold cathode gas laser in glow discharge of inert gas with mass number not less than 20 by means of ignition and maintaining of glow discharge between cold cathode, located at negative potential of DC voltage, and composite anode, after high-vacuum pump is filled with process device with gaseous oxygen to pressure exceeding pressure of filling with oxygen at stage of cold cathode working surface cleaning, cold cathode working surface is cleaned gas laser in glow discharge oxygen by means of ignition and maintaining of glow discharge between cathode at negative potential DC voltage, and composite anode, after high-vacuum pump is filled with process device with gaseous oxygen, changing polarity of voltage supplied to cold cathode gas laser and composite anode on opposite is anodic oxidation of working surface of cold cathode gas laser in glow discharge oxygen by means of ignition and maintaining of glow discharge between cathode located at positive potential of DC voltage, and composite anode varied polarity of voltage supplied to cold cathode gas laser and technological anode on opposite, combustion voltage value is measured in glow discharge of gaseous oxygen between cathode, located at negative potential of DC voltage, and composite anode at selected to measure voltage discharge current for minimum time sufficient for measuring, after that, change polarity of voltage supplied to cold cathode gas laser and composite anode on opposite, stopped anodic oxidation of working surface of cold cathode gas laser under positive potential in glow discharge of oxygen, immediately after when during combustion of voltage measurement at polarity voltage combustion between cold cathode, located at negative potential, and process anode, stabilises or passes at least he discharge current selected to measure voltage, current value smoldering discharges at all stages of treatment is set not lower than value of operating current gas laser pressure of gas filling process device at any stage of treatment is set not exceeding half of working pressure of filling gas laser.

EFFECT: technical result is creation of optimal thickness of anodic oxide film on surface of cold working cathode in a gas laser device composed of process by glow discharge of direct current, ensuring a stable and repeatable reduced by 10-20 % and voltage of igniting gas discharge ignition of cold cathode, improved resistance cold cathode to spray in a glow discharge and increased at least 2 times service life in a gas laser.

1 cl, 3 dwg, 2 tbl