METHOD FOR MASS-SPECTROMETRIC CHECK OF LEAK-PROOFNESS OF MONOBLOCK GAS LASERS Russian patent published in 2000 - IPC

FIELD: manufacture of small-sized monoblock gas lasers. SUBSTANCE: the method consists in creation of closed spaces on both sides of the laser shell under check, pumping-out of the inner space together with the probe gas analyzer to a high vacuum, accumulation of probe gas in the shell under check by stopping the pumping-out of the rest gases, and monitoring of variation of the background value of the probe gas peak for the check time selected in the section of linear growth of the probe gas peak, resumption of pumping-out of probe gas from it at pumping-out of the rest gases, monitoring of variation of the total value of the probe gas peak for the same check time, and estimation of article leak-proofness by the difference of the total and background values of the probe gas peak for the check time. The specific feature of the method is in the fact that measurement of the background flow of probe gas is continued until the dependence of the intensity of the probe gas background value on time at adjacent measurements coincides in slope and intensity accurate to 10%, but at least 3 times, and at accumulation of probe gas the analyzer is left connected to the shell under check, and pumping-out and monitoring of the total value of the probe gas peak are stopped after the delay time after filling of the outer closed space with probe gas, which is determined by the laser design and probe gas and cannot be less than the settling time of the probe gas flow through the defects of surfaces connected vacuum tightly by the method of optical contact; the laser is considered to be leak-proof if the measured dependence of the probe gas flow on time differs in slope and intensity from the dependence of the probe gas background flow on time by no more than 10%. Leak- proofness may be checked during annealing of the article at temperature T ≤ T_ann, where T_ann - article annealing temperature. EFFECT: enhanced sensitivity and accuracy of check of monoblock gas lasers, enhanced reliability in service. 2 cl