METHOD OF COATING SUBSTRATE BY CHEMICAL VAPOUR DEPOSITION Russian patent published in 2015 - IPC C23C16/455 C23C16/40 H01L31/04 

Abstract RU 2555273 C2

FIELD: chemistry.

SUBSTANCE: present invention relates to a method of coating a substrate (2), having on its surface a material different from silicone rubber, or consisting of such material, by chemical vapour deposition using a flame. The method includes exposing the substrate to a burner flame (1), to which a stream of precursor elements which enable to obtain coating material is added. Without external cooling, the substrate is moved relative to said flame with a relative speed greater than 30 m/min while allowing the flame to stretch along the reaction zone (3) located behind the burner.

EFFECT: obtaining a coating of good quality, particularly on heat-sensitive materials.

26 cl, 6 dwg

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RU 2 555 273 C2

Authors

Siau Sam

Khertsenberger Frants

De Sluver Kurt

Dates

2015-07-10Published

2011-08-26Filed