DISPLAY METHOD OF CRYSTALLOGRAPHIC PLANES OF SINGLE-CRYSTAL PLATES AND HETEROSTRUCTURES Russian patent published in 2015 - IPC G01N23/20 

FIELD: measurement equipment.

SUBSTANCE: method involves measurement of a diffraction angle from the investigated plane by means of X-ray single-crystal diffraction analysis with a sliding quasiparallel X-ray beam with total beam divergence and convergence of 12'-24' asymmetrical reflections from crystallographic planes located at an angle of more than 10° to the basic plane coinciding with the interface surface of the heterostructure, and rotation of the heterostructure till maximum reflection is obtained, with that, a new basic plane is chosen, which coincides with one of the crystallographic planes inclined to the interface, relative to which expositions are performed for asymmetrical surveys with angles of incidence and reflection, which correspond to this crystallographic plane so that the angle of incidence to a new basic plane is sum of Bragg angle for the investigated plane and angle of its turn relative to the new basic plane.

EFFECT: providing a possibility of displaying the planes that are not subject to displaying by other methods.

8 dwg