PHOTOIONIZED GAS ANALYZER Russian patent published in 2015 - IPC H01J37/00 

FIELD: measurement equipment.

SUBSTANCE: invention relates to instruments for measurement of content of volatile substances in air, in particular, to photoionized gas analyzers. A photoionized gas analyzer comprises an ionization chamber (1), a lamp of vacuum ultraviolet radiation (4) with a window (5) for radiation release into the ionization chamber, two gas lines (8) and (9), one of which serves to supply analyzed gas, and the second one - for supply of the agent used to clean the ionization chamber from contamination, and an electronic unit (10), which serves to tune the gas analyzer, to measure a signal of the ionization chamber and to generate control actions. In the second gas line (9) there is a source of vapours of hydrogen fluoride, at the output of which there is a stop valve (12).

EFFECT: increased sensitivity of a photoionized detector of a gas analyzer by exclusion of contamination on a window and electrodes of an ionization chamber related to deposit of oxygen-containing silicon compounds.

5 cl, 1 dwg