FIELD: chemistry.
SUBSTANCE: invention relates to a wear resistant single- or multilayer coating applied by low-pressure chemical vapour deposition (LPCVD) without exciting plasma on a body made of metal, solid, alloy, cermet or ceramic, and to a method of applying said coating. Said coating contains at least one composite layer of solid material, wherein the main phases are cubic TiAlCN or hexagonal A1N. The cubic TiAlCN is microcrystalline face-centred cubic fcc-Ti1-xAlxCyNz, where x>0.75, y=0-0.25 and z=0.75-1 with crystallite size ≥0.1 mcm, wherein said composite layer further contains in grain boundary regions amorphous carbon with weight ratio of 0.01-20%. Said composite layer is deposited on said body via said method using a gas mixture containing Ti, Al, C and N precursors at temperature of 700-900°C and pressure of 102-105 Pa.
EFFECT: providing a coating with a fine-grained composite structure with a smooth homogeneous surface, high oxidation resistance and high hardness.
12 cl, 3 dwg, 2 ex
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Authors
Dates
2015-09-20—Published
2010-11-12—Filed