METHOD FOR OBTAINING MULTILAYER NANOCOMPOSITE COATING Russian patent published in 2022 - IPC C23C28/00 C23C14/35 B82B3/00 

FIELD: multilayer coatings.

SUBSTANCE: invention relates to methods for applying multilayer coatings and can be used in engineering, mining and oil industry, tool and repair industries to harden the substrate in the form of machine parts, friction pairs or cutting tools. The substrate is cleaned in glow discharge plasma. Then, an adhesive sublayer of titanium nitride TiN is deposited, after which a layer of titanium and aluminum nitride TiAlN is applied. Then a layer of titanium, aluminum and silicon nitride TiAlSiN is applied with two magnetrons turned on with a Ti target and an Al + 2-5% Si composite target in a gas mixture of argon and nitrogen in a percentage ratio of N₂/Ar in the form of (30-35)/(70- 65) at a partial pressure of 0.97-1.03 Pa, a negative bias voltage of 80-90 V and a bias current on the substrate of 0.7-0.8 A, a voltage on the Ti target of 500-550 V, a voltage on the composite target Al + 2-5% Si - 250-300 V and rotation speed of the substrate holder 10-15 rpm for 40-60 min. Application of said layers is carried out at a distance from said targets to said substrate, equal to 160-170 mm.

EFFECT: obtaining a multilayer coating with a synergistic effect of a TiN sublayer and TiAlN and TiAlSiN layers with an anti-corrosion nanocomposite top layer, as well as high adhesive strength of the resulting coating with the substrate material.

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