METHOD OF PRODUCING MULTILAYER COATING FOR OPERATION IN TRIBOCORROSION CONDITIONS Russian patent published in 2024 - IPC C23C14/16 C23C14/18 C23C14/35 

FIELD: various technological processes.

SUBSTANCE: invention relates to a method of producing a wear-resistant and corrosion-resistant multilayer coating. Ion cleaning of substrates is carried out using two arc evaporators containing two titanium cathodes. Then, a titanium sublayer is applied at negative bias voltage on substrates – 250–280 V, pressure of 5.0·10^-3 Pa, current on arc evaporators of 90–100 A and temperature of 500–550 °C, supported during deposition of titanium sublayer. Then, three alternating layers are applied on said titanium sublayer – a layer of zirconium and aluminium nitride with a hexagonal crystal lattice of h-Zr_1-xAl_xN with 0.37≤x≤0.75 with crystallite diameter of 30–50 nm, a titanium nitride layer with a cubic crystal lattice of c-TiN with crystallite diameter of 10–20 nm and a layer of aluminium nitride c-AlN with a crystallite diameter of 10–20 nm. When depositing a layer of h-Zr_1-xAl_xN, magnetron sputtering is carried out for at least 10–15 minutes, with nitrogen content of 15–20% in a gas mixture of nitrogen and argon, using two magnetrons containing two aluminium targets with power N_Al=2.7–2.8 kW and a magnetron with a zirconium target with power N_Zr=2.4–2.5 kW. When depositing a layer of titanium nitride c-TiN, magnetron sputtering is carried out for at least 10–15 minutes, with nitrogen content of 30–35% in said gas mixture, using a magnetron with power N_Ti=2.4–2.5 kW with a titanium target. When depositing a layer of aluminium nitride c-AlN, magnetron sputtering is carried out for at least 10–15 minutes using two magnetrons with power N_Al=2.7–2.8 kW, containing two aluminium targets, with nitrogen content of 15–20% in said gas mixture. Deposition of said three alternating layers is repeated at least ten times, with the layer of h-Zr_1-xAl_xN is applied on top.

EFFECT: multilayer wear-resistant and corrosion-resistant coating.

3 cl, 5 dwg, 2 tbl