METHOD OF PRODUCING WEAR-RESISTANT MULTILAYER COATING FOR HIGH-SPEED PROCESSING Russian patent published in 2024 - IPC C23C14/35 C23C14/16 C23C14/18 

FIELD: various technological processes.

SUBSTANCE: invention relates to a method of producing a wear-resistant multilayer coating for high-speed processing. Ion cleaning of substrates is carried out by means of two arc evaporators with titanium cathodes. Then, a Ti sublayer is deposited on the substrate by vacuum-arc evaporation. On said titanium sublayer alternating layers are applied – a layer of zirconium nitride and aluminium with a hexagonal crystal lattice of h-Zr_1-xAl_xN, where 0.37≤x≤0.75, with crystallite diameter of 30–50 nm and a layer of zirconium nitride and titanium with a cubic crystal lattice with crystallite diameter of 10–20 nm. When depositing said layer of h-Zr_1-xAl_xN, magnetron sputtering is carried out using a magnetron containing one zirconium target, and a magnetron containing one aluminium target, with nitrogen content of 15–20 % in a gas mixture of nitrogen and argon for at least 10–15 minutes. Power N_Zr=2.4–2.5 kW is set on magnetron with zirconium target and power N_Al=2.7–2.8 kW on magnetron with aluminium target. When depositing said layer of zirconium nitride and titanium, magnetron sputtering is carried out for at least 10–15 minutes, with nitrogen content of 30–35% in said gas mixture, at power N_Zr=N_Ti=2.4–2.5 kW on magnetron containing one zirconium target and magnetron containing one titanium target. Deposition of two alternating layers is repeated at least ten times and the above layer of h-Zr_1-xAl_xN is applied as an upper layer.

EFFECT: obtaining a multilayer wear-resistant coating with improved adhesion for high-speed processing.

3 cl, 4 dwg