METHOD FOR OBTAINING A MULTIFUNCTIONAL MULTILAYER COATING Russian patent published in 2022 - IPC C23C14/06 C23C14/35 C23C14/56 

FIELD: machine building, mining and oil industries.

SUBSTANCE: invention relates to a method for obtaining a multilayer coating on a substrate in the form of a part of a friction pair or a cutting tool and can be used in machine building, mining and oil industry, in tool and repair industries to harden the surface of a tool and friction pairs. The substrate is cleaned in glow discharge plasma. Then, a CrTiAlZr sublayer is deposited onto the substrate. Then layers of zirconium and aluminum nitride, titanium and aluminum nitride and chromium and aluminum nitride are applied in turn at a partial pressure of 0.97-1.03 Pa, a substrate holder rotation speed of 10-15 rpm, a negative bias voltage of 80-90 B, a bias current on a substrate 0.7-0.8 A in a gas mixture of nitrogen and argon in a percentage ratio of N₂:Ar=30:70 at current and voltage on all magnetrons 6-7 A and 340-480 B. Each layer is applied for at least 30 minutes. The application of alternating layers is repeated at least twice until the required coating thickness is obtained.

EFFECT: invention provides possibility for obtaining a multilayer coating with high physical-mechanical, tribological, thermodynamic and anti-corrosion properties, as well as high adhesive strength of the coating with the substrate material.

1 cl, 2 dwg, 1 tbl