FIELD: metallurgy.
SUBSTANCE: vacuum device for gallium phosphide decomposition contains a vacuum chamber, cylindrical heater located inside the chamber along axis, column of evaporating trays for gallium phosphide installed coaxially inside the heater on the hearth, cylindrical screens installed concentric outside the tray column and tightly covered with lids, pipe spiral water cooled condenser installed above the screen lids, scrubber for vapours of phosphorus pentoxides obtained during the gallium phosphide decomposition, at that the condenser is made with the ejector mixing chamber, containing flange connection with nozzle for supply in it for the phosphorous vapours oxidation to phosphorus pentoxide, and diffuser for the phosphorus pentoxide removal to the scrubber.
EFFECT: combination of decomposition, oxidation and absorption of the phosphorus pentoxide, as well as decreasing of phosphorus accumulation on the condenser.
2 cl, 2 dwg
