FIELD: recycling and disposal of waste.
SUBSTANCE: invention relates to the processing of semiconductor wastes containing gallium arsenide. Apparatus comprises a cylindrical vacuum chamber with a cylindrical multilayer screen, a cylindrical heater located inside the chamber along the axis with a lower current lead, column of lid-covered flash pans installed in the cavity of the cylindrical heater on the bottom along the axis, condenser with a lid and a sealed gallium collector installed above the lids. Bottom is made with an overflow channel connected to a sealed gallium collector. In the lid of the condenser, a semi-conductor waste loading hopper is sealed, equipped with a gate and valves for evacuation and nitrogen supply. Flash pans are made in the form of a cone with a small base diameter, increasing from the bottom to the top pan and with holes at the large base for gallium drain to the bottom, which is connected to the gallium collector by means of a siphon trap. Inclination of the walls of the cone of pans to the horizontal is 20–35 °.
EFFECT: it is possible to load up raw materials into the chamber without complete cooling and vacuum relief.
8 cl, 4 dwg
