METHOD OF MAKING MEMBRANE STRUCTURES Russian patent published in 2011 - IPC H01L21/70 B01D67/00 

FIELD: physics.

SUBSTANCE: method of making membrane structures involves preparation of a substrate from green ceramic, making at least one hole in said substrate, making a membrane workpiece from the green ceramic, assembling the membrane structure by joining said membrane workpiece with the surface of the substrate with a hole(s) so that the workpiece covers the hole, forming a membrane in the region of the hole, followed by thermal treatment of the membrane structure for firing the green ceramic. Several substrates with holes are made. At least one membrane woprkpiece is made. When assembling the membrane structure, joining of the crude substrate with holes and the membrane workpiece is done more than once. Assembling is completed by joining either another substrate or another membrane workpiece, thus forming either a single-level membrane structure with a membrane depressed between the planes of the final substrate, or a multi-level membrane structure. Three versions of the method are disclosed.

EFFECT: broader functionality of discrete and matrix membrane structures based on piezoelectric ceramics, high boundary parameters of electronics articles made from said structures.

9 cl, 14 dwg