APPARATUS FOR INSPECTING QUALITY PARAMETERS OF FLAT OPTICAL COMPONENTS ARRANGED AT ANGLE TO OPTICAL AXIS Russian patent published in 2016 - IPC G01B9/02 

FIELD: physics.

SUBSTANCE: apparatus for inspecting the quality of flat optical components arranged at an angle to an optical axis consists of a transmitting channel, which includes a radiation source which forms two beams lying at a distance from each other with mutually perpendicular linear polarisation states, situated in the focal plane of a lens, a quarter-wave plate, as well as, arranged in series on the radiation path at the lens output, a reference optical plate, an optical component being inspected and a reversible mirror, as well as a receiving channel which includes a beam splitter, followed by a radiation detector consisting of a photodetector array and a linear analyser, which enables to record multiple interference patterns at the same time, which are required for further analysis. The radiation source includes two point sources at a distance Δ from each other, perpendicular to the optical axis. The apparatus is adapted to adjust the distance L between the flat reference surface of the reference plate and the reversible mirror according to the limiting condition of the maximum allowable distance: where D is the diameter of the inspected component, f' is the focal distance of the lens, n×n is the number of row and column elements of the photodetector array.

EFFECT: minimising measurement error.

2 cl, 2 dwg