FIELD: measuring.
SUBSTANCE: invention can be used in measurement equipment, for measuring the radius of optical spherical surfaces, as well as when inspecting optical components both during and after production thereof. Device includes an additional light-splitting element installed between the coherent light source and the light-splitting element of the Fizeau interferometer, in addition, the device is supplemented with an incoherent illuminator with controlled phase shift, including an incoherent light source, a light-splitting element of the incoherent illuminator with controlled phase shift, movable and fixed mirrors, incoherent illuminator movable mirror linear encoder with controlled phase shift, focusing lens, wherein the incoherent illuminator with controlled phase shift is connected to the additional beam-splitting element in such a way that a divergent light beam from it falls on the additional beam-splitting element.
EFFECT: broader functional capabilities of the device, specifically creating the possibility of measuring the surface radii of the processed part greater than the maximum value of movement of the reference lens or controlled surface and the length of the Fizeau interferometer encoder, shorter measurement process, simple design and smaller size of the device.
1 cl, 6 dwg
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Authors
Dates
2025-04-28—Published
2023-12-11—Filed