MULTICHANNEL CONFOCAL MICROSCOPE (VERSIONS) Russian patent published in 2016 - IPC G02B21/00 G01B9/04 

FIELD: physics.

SUBSTANCE: microscope comprises an illumination unit in which a diffraction optical element forms a square matrix of rays from collimated light, said element focusing the said rays in the plane of an array of confocal diaphragms and guiding the said rays through a beam splitting cube, a scanning module and a focusing optical system onto an object. Rays reflected from the object return in the reverse direction, are deflected by the cube and fall on a detecting unit on a photodetector array through an additional array of confocal diaphragms, the scanning module and the focusing optical system. The scanning module comprises two refracting plane-parallel plates placed on orthogonal rotor axes. The movement of the plates is synchronised with the movement of the plates of the corresponding scanning module of the detecting unit. In the second version, the diffraction optical element focuses light rays in the plane of the array of diaphragms through the beam splitting cube, and the rays reflected from the object are deflected by the cube and fall on the photodetector array through an optical filter, the scanning module and the focusing optical system.

EFFECT: eliminating ellipticity of the cross-section of the laser beam and simple design, while maintaining high resolution and accuracy.

2 cl, 7 dwg