MULTICHANNEL CONFOCAL MICROSCOPE Russian patent published in 2018 - IPC G02B21/00 

FIELD: instrument engineering.

SUBSTANCE: invention relates to the field of instrument-making related to the production of optoelectronic equipment. In the lighting unit of the device, the collimated light of the laser source is split into a matrix of beams by means of a diffractive optical element; the ray array is then deflected by a beam splitting cube and focused into the plane of the diaphragm array, passes through the beam splitter plate and further the deflection or scanning of the array of rays along the two coordinates of the object under investigation is realized by means of two plane-parallel plates mounted on orthogonally oriented axes of electric motor rotors or galvanic scanners and forming optics, then said rays pass through a birefringent plate, they pass through the focusing optics to the object under study, and the optical signal reflected from the object under study is returned in the opposite direction to the beam splitting cube, passes through the cube, and enters the detection matrix of the photodetectors through a polarization filter that wraps the image along two orthogonal axes, an optical element, a projection lens, a rotating mirror, then passes through the plane-parallel plates of the lighting unit and the projection lens. Normalization block consisting of a projection lens and a recording matrix of photodetectors serves to adjust the intensity of rays.

EFFECT: suppression of stray reflected light from the optical elements of the lighting unit and an increase in the signal-to-noise ratio in the recording unit.

1 cl, 3 dwg