FIELD: measurement equipment.
SUBSTANCE: invention provides for entry of measurement light emitted from a facility to be measured into a unit of fixed mirrors and a unit of movable mirrors, and generates light produced by interference of measurement light reflected by the unit of fixed mirrors, and measurement light reflected by the unit of fixed mirrors. Simultaneously with this change of light intensity produced by interference of measurement light is produced by moving the unit of movable mirrors, and the interferogram of the measurement light is produced on the basis of this change. At the same time entry of the reference light of narrow wave length band included into the measurement light wave length band is provided into the unit of fixed mirrors and the unit of movable mirrors, and light is generated, which is produced by interference of reference light reflected by the unit of fixed mirrors, and reference light reflected by the unit of fixed mirrors. At the same time the unit of movable mirrors moves to correct the interferogram of measurement light on the basis of the amplitude of light change produced by interference of the reference light, and on the basis of phase difference between the measurement light, which has the same wave length, as the reference light in the measurement light, and the reference light, and on the basis of the corrected interferogram the measurement light spectrum is produced.
EFFECT: invention makes it possible to measure spectral characteristics of an object with high accuracy, suppressing effect of disturbances.
8 cl, 11 dwg
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Authors
Dates
2016-02-27—Published
2013-02-27—Filed