FIELD: metrology.
SUBSTANCE: invention relates to metrology, namely to vibrometry. Method of measuring vibrations suggests application of light-reflecting marks, registration of control points with vibration blurring, obtaining binary images in the form of matrix of associated elements. In the absence of vibrations coordinates of centers of gravity of labels and their radii are determined. Then from the matrix of associated elements edge elements of traces are allocated and their coordinates are recorded, on the basis of those distances from edges of traces to their centers of gravity are calculated. Minimum distance is equal to half the width of traces, maximum distance is equal to half the length of traces, and straight lines passing through centers of gravity and edge elements of traces that are maximally distant from the centers of gravity determine their angular position. Also calculated is half of the maximum width of traces, projections of amplitude vectors of vibratory displacement of marks in the direction, perpendicular to the image plane, proportional to the difference between the maximum value of half of the width of traces and radius of marks, projections of amplitude vectors of vibratory displacement of marks onto image plane, proportional to the difference between the half of length of traces of marks and half of the correcting width of traces.
EFFECT: technical result is simpler measurement procedure, higher accuracy of control.
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Authors
Dates
2016-09-10—Published
2015-06-08—Filed