DEVICE FOR PRESSURE AND TEMPERATURE MEASURING Russian patent published in 2016 - IPC G01L9/00 G01K7/00 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment and can be used for simultaneous measurement of pressure, temperature and heat flow with compensation for temperature influence on pressure measurement results. Sensitive element (SE) for pressure measurement is selected "silicon-on-sapphire" consisting of artificial sapphire and titanium metal film. In addition to sapphire substrate lower plate is included, and upper plate is capacitor titanium film. On sapphire four armed strain-gauge bridge (TM) is formed. Capacitive SE is formed by arrangement of dielectric ring between capacitor lower and upper plates and is protected from external electromagnetic noise with shield. Temperature and heat flow SE is coaxially and symmetrically formed on upper and lower surfaces of other dielectric film. Sensor structure package consisting of two parts is assembled under vacuum, located inside housing and protected by mesh. For electric connections provision is made for terminal block with connectors and circuit board, on which high-resistance protective circuit and charge amplifier are mounted. Sensor cavity behind membrane maintains communication with atmosphere by pipe with covers, passing through sensor structure first part. On sensor structure second part at least 10 support through holes are made. Between sensor structure first and second parts air gap is formed. Communication with atmosphere between sensor structure first and second parts is accomplished by support pipes and holes. Sensor housing is connected to device common ground and sensor structure first part and filled with soft sealant.

EFFECT: technical result consists in possibility of simultaneous measuring in specified section of sound pressure (pulsations, explosive, impact, wind), sound pressure (total pressure), static pressure (absolute, excess, differential), temperature and heat flow.

1 cl, 2 dwg