FIELD: physics, instrument-making.
SUBSTANCE: invention relates to microelectronics and microsystem engineering and is a capacitor with a voltage-controlled capacitance, i.e., a varicap. The varicap is a "metal-porous silicon" heterostructure, where pores of the porous silicon are filled with metal by electrochemical deposition. The varicap can be used in integrated electronic devices for adjusting frequency and frequency modulation, as well as in devices requiring the use of high-capacitance capacitors in integrated form.
EFFECT: invention increases specific capacitance and varicap capacitance overlapping coefficient.
2 cl, 7 dwg
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