FIELD: microelectronics, audio and video appliances. SUBSTANCE: capacitor is made of monocrystalline doped silicon substrate provided with many holes 4, insulating layer 4, and conducting layer 5 functioning as antielectrode; all these parts of substrate are obtained by etching in fluoride-containing acid electrolyte which connects substrate as anode. EFFECT: improved resistivity of capacitor. 20 cl, 3 dwg
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