FIELD: physics.
SUBSTANCE: disclosed is a gas-absorbing material in form of a nanocomposite gas-absorbing structure for maintaining vacuum in different devices, including in micro-electromechanical systems. The nanocomposite gas-absorbing structure is porous silicon with nanoscale pores filled with a gas-absorbing layer of an active metal or alloy thereof.
EFFECT: structure has high value of effective area with high value of sorption capacity owing to use of porous silicon with nanoscale pores and active metals and alloys thereof with open porosity, placed in a silicon matrix, which is the technical result of the invention; the obtained structure prevents formation and falling of microparticles and can be easily built into miniature volumes.
2 dwg
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