NANOCOMPOSITE GAS-ABSORBING STRUCTURE Russian patent published in 2012 - IPC H01K1/56 

Abstract RU 2439739 C1

FIELD: physics.

SUBSTANCE: disclosed is a gas-absorbing material in form of a nanocomposite gas-absorbing structure for maintaining vacuum in different devices, including in micro-electromechanical systems. The nanocomposite gas-absorbing structure is porous silicon with nanoscale pores filled with a gas-absorbing layer of an active metal or alloy thereof.

EFFECT: structure has high value of effective area with high value of sorption capacity owing to use of porous silicon with nanoscale pores and active metals and alloys thereof with open porosity, placed in a silicon matrix, which is the technical result of the invention; the obtained structure prevents formation and falling of microparticles and can be easily built into miniature volumes.

2 dwg

Similar patents RU2439739C1

Title Year Author Number
NANOCOMPOSITE GETTERING STRUCTURE AND METHOD OF ITS PREPARATION 2012
  • Timoshenkov Sergej Petrovich
  • Gaev Dakhir Sajdullakhovich
  • Bojko Anton Nikolaevich
RU2523718C2
METHOD TO PRODUCE GAS-ABSORBING STRUCTURE 2011
  • Timoshenkov Sergej Petrovich
  • Gaev Dakhir Sajdullakhovich
  • Bojko Anton Nikolaevich
RU2474912C1
VARICAP AND METHOD OF MAKING SAME 2015
  • Timoshenkov Sergej Petrovich
  • Gaev Dakhir Sajdullakhovich
  • Bojko Anton Nikolaevich
RU2614663C1
METHOD FOR MAKING CATALITIC LAYER OF FUEL CELL 2007
  • Nechitajlov Andrej Alekseevich
  • Khamova Tamara Vladimirovna
  • Zvonareva Tat'Jana Konstantinovna
  • Shilova Ol'Ga Alekseevna
  • Astrova Ekaterina Vladimirovna
  • Sreseli Ol'Ga Mikhajlovna
RU2358359C1
MICROELECTROMECHANICAL ISOCHORIC FUSE 2012
  • Borzov Andrej Borisovich
  • Likhoedenko Konstantin Pavlovich
  • Tsygankov Viktor Jur'Evich
  • Apresjan Arsen Manvelovich
RU2522362C1
METHOD FOR FORMING BULK SILICON ELEMENTS FOR MICROSYSTEM TECHNOLOGY DEVICES AND A PRODUCTION LINE FOR IMPLEMENTING THE METHOD 2022
  • Smirnov Igor Petrovich
  • Kozlov Dmitrij Vladimirovich
  • Kharlamov Maksim Sergeevich
  • Shestakova Kseniya Dmitrievna
  • Korpukhin Andrej Sergeevich
RU2794560C1
METHOD OF MANUFACTURE OF NEGATIVE ELECTRODE OF LITHIUM-ION BATTERY 2017
  • Trunin Evgenij Borisovich
RU2662454C1
MICROELECTROMECHANICAL FUSE 2012
  • Borzov Andrej Borisovich
  • Likhoedenko Konstantin Pavlovich
  • Tsygankov Viktor Jur'Evich
  • Apresjan Arsen Manvelovich
RU2522323C1
PROBE FOR SCANNING PROBE MICROSCOPY AND METHOD OF ITS MANUFACTURING (EMBODIMENTS) 2017
  • Sinev Ivan Sergeevich
  • Mukhin Ivan Sergeevich
  • Samusev Anton Kirillovich
  • Makarov Sergej Vladimirovich
  • Komissarenko Filipp Eduardovich
RU2660418C1
METHOD FOR PRODUCING MULTILAYER CUO/C NANOCOMPOSITE FILMS WITH SENSOR PROPERTIES IN WIDE SPECTRAL OPTICAL RANGE 2023
  • Pugachevskii Maksim Aleksandrovich
  • Nei Ving Aung
RU2810420C1

RU 2 439 739 C1

Authors

Timoshenkov Sergej Petrovich

Gaev Dakhir Sajdullakhovich

Bojko Anton Nikolaevich

Dates

2012-01-10Published

2010-12-01Filed