CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR FORMING STRUCTURE OF RESISTOL FILM OF CHEMICAL AMPLIFICATION, AND METHOD OF FORMING STRUCTURE, METHOD OF MANUFACTURING ELECTRONIC DEVICE Russian patent published in 2017 - IPC G03F7/32 G03F7/30 B65D81/24 H01L21/27 

FIELD: chemistry.

SUBSTANCE: invention relates to a container comprising the housing unit which includes an organic treatment solution representing an organic developer for forming the structure of the resistol chemical amplification film. Wherein the organic treatment solution contains the organic 1 part / million or less of alkylolephine having the number of carbon atoms of 22 or less, and 5 pt. / million or less of the metal element concentration for each of Na, K, Ca, Fe, Cu, Mg, Mn, Li, Al, Cr, Ni and Zn. the housing unit has an inner wall that comes into contact with the organic treatment solution, wherein the inner wall is made of perfluoro resin. The organic developer contains at least one developer selected from the group consisting of a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent and an ether-based solvent. A container embodiment, a method of forming the structure of the resistol film of chemical amplification and a method of manufacturing the electronic device are proposed as well.

EFFECT: invention allows to reduce the occurrence of particles, which create problems in the fine structure.

10 cl, 3 tbl, 16 ex