DEVICE FOR CONTROLLING OBJECT SURFACE PURITY Russian patent published in 2017 - IPC G01N19/02 

FIELD: measuring equipment.

SUBSTANCE: invention may find application in the vacuum and electronic instrument engineering, nuclear engineering and other applications requiring high purity of surfaces, working in conditions of the controlled ambient, in particular very strict requirements to the surfaces of cathodes for night vision devices, to the walls of vacuum chambers and equipment of thermonuclear synthesis installations, the device surfaces for vacuum measurement, and can be used at pressures in the range of 10⁵-10^-10 Pa, at the operating atmospheric humidity in the range of 0.1-0.95 RH and temperatures of -40 to 150°C. The device for controlling the object surface purity comprises a polished stationary clamping plate, a movable plate with a sample surface, a stationary base plate, all successively located. Also, the device comprises a rack, on which a stationary base plate and resilient plates are fixed, one of which is connected to the clamping plate and provides a clamping force, and the second, via the connecting member, is fixed to the test plate and provides a breakaway force, a strain gauge mounted and fixed to the second resilient plate. Furthermore, the device comprises piezo drives connecting the resilient plates with the base, and a breakaway force measurer connected to the load cell. Herewith a pressure measuring unit, a saturating vapour pressure measuring unit, a temperature measuring unit, a humidity measuring unit, a mode setting unit, a special computing unit are additionally introduced into the device. Herewith there are thin polished films on the surface of the plates having adsorption energy E_a identical to the test surface, the outputs of the pressure measuring unit, the saturating vapour pressure measuring unit, the temperature and humidity measuring units are connected to the inputs of the mode setting unit, and the outputs of the breakaway force measurer and the mode setting unit are connected to the inputs of the special computing unit.

EFFECT: increasing the measurement reliability for objects having different chemical surface composition and, accordingly, different absorption energy E_a, that expands their field of application.

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