PLATE SURFACE PURITY SENSOR Russian patent published in 2017 - IPC G01N19/08 

FIELD: measuring equipment.

SUBSTANCE: plate surface purity sensor comprises an investigated plate mounted with the possibility to move over the immovable base plate, and a measuring unit. Herewith the sensor further includes a immovable pressing polished plate located over the investigated polished plate, a rack, on which the movable and immovable plates are fixed, being polished as well. The sensor also contains elastic plates, one of which is connected with the clamping plate and provides the pressing force, and the second one is connected with the investigated plate through the connecting element and provides the breakaway force, strain gauges mounted on the elastic plates, piezo-bimorph drives connecting the strain gauges with the base. Herewith the measuring unit is designed as a pressing force and a breakaway force measurer. Herewith the plates, serving to create contact zones (movable and immovable), can be made from a single-crystal or fused quartz or plates of single-crystal silicon, and the elastic plates are made of beryllium bronze or spring steel, the strain gauge - as a resistance strain gauge or a strain-sensing piezo-resonator of single-crystal AT-cut quartz.

EFFECT: creating the sensors that measure the surface purity of devices and mechanisms operating in a wide range of pressures and in conditions of the working atmosphere humidity changes in the range of 0,1-0,95 RH, and being convenient for use in vacuum technology, electronics, accurate instrumentation, mechanical engineering, chemical, oil and gas and other industries.

5 cl, 5 dwg