DIAPHRAGM PRESSURE SENSOR Russian patent published in 2021 - IPC G01L7/08 

FIELD: pressure measuring.

SUBSTANCE: invention relates to the field of membrane pressure sensors for measuring the pressure of liquids and gases, in particular, in wells. The membrane pressure sensor contains a reference pressure chamber with an elastic membrane separating it from the medium, the pressure of which is measured, and containing means of measurement, including a sensor of the degree of membrane deformation, as well as means for protecting the membrane from excessive deformation and auxiliary layers, while the elastic membrane is made of monocrystalline silicon and pressed along its perimeter to the chamber seat, and both contacting surfaces or only the surface of the chamber seat contain/s auxiliary buffer layer with a thickness of 0.7 to 2.5 μm made of polycrystalline silicon or from a composite with silicon content not less than 15 at. %.

EFFECT: technical result is to increase the accuracy of measuring the pressure of gas or other fluids, ensure the stability of the critical parameters of the sensor, ensure the stability of readings and reproducibility of measurements, ensure a low scatter of characteristics of sensors of the same type and rating, increase resistance to external influences and service life, and simplify the design of the sensor and its manufacturing technology, including for different pressure ranges.

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