FIELD: engines and pumps.
SUBSTANCE: vacuum pump for creating a reduced pressure comprises a chamber (14, 15) with an inlet (143) and an outlet (150) which is provided with a valve (3), and pump chamber (14, 15) is provided with a pressure sensor (23, 23', 24), which comprises a sensor membrane (23, 23'), the pump chamber includes a first compartment (14) and a second compartment (15) which communicates with first compartment (14) through the through hole, wherein first compartment (14) has an inlet (143) and second compartment (15) has an outlet (150), the pump further comprises a vacuum membrane (20, 21) for creating underpressure in pump chamber (14, 15), spanning first chamber compartment (14), sensor membrane (23, 23') overlaps second chamber compartment (15), and both said membranes are made in a single piece, or both of these two membrane are two parts made separately from each other.
EFFECT: measurement of reduced pressure without taking into account losses and leaks due to the pressure sensor location in the pump chamber.
15 cl, 8 dwg
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Authors
Dates
2017-06-15—Published
2012-09-27—Filed