METHOD AND DEVICE FOR FABRICATION OF MASK FOR LASER UNIT FOR PRODUCTION OF MICROSTRUCTURES Russian patent published in 2016 - IPC G03F1/00 G03F7/00 B23K26/06 C03C23/00 

FIELD: process engineering.

SUBSTANCE: claimed invention relates to laser processing, particularly, to fabrication of masks and apertures for laser unit meant for production of microstructures on the solid body surface. This process includes the formation of gaps on the mask surface to dissipate the laser radiation. Mask gaps dissipating the laser radiation are modified owing to the material density variation as well as material structure and refraction index. Said modification is executed by the beam of fs- or ps-laser or laser on fluorine molecules. Said modified gaps ensure a strong dissipation of the laser incident beam and act as opaque surface during the entire process of microstructure development of the solid body surface.

EFFECT: higher wear resistance of masks and accuracy of fabrication.

5 cl, 8 dwg