METHOD FOR MEASURING PHYSICAL VALUES USING SENSORS ON SURFACE ACOUSTIC WAVES Russian patent published in 2017 - IPC H01L31/00 

FIELD: measuring equipment.

SUBSTANCE: invention may be used for remote wireless measurement of various physical values, in particular temperature, pressure, displacement, magnetic induction, ultraviolet radiation, gas concentration, etc, using sensors on surface acoustic waves (SAW) during their irradiation with radio pulses. The secondary reflected from the CT SAW which arise due to reflections SAW from the transceiver CT and are reflected from them again, then, together with the primary reflected SAW through the transceiver antenna, enter the reader. The Fourier transformation of the frequency response of the complex reflectivity of the reader antenna is obtained and a pulse response of the SAW sensor is obtained, containing secondary reflection peaks from the supported reflective CT, a reflective CT loaded with an impedance which quantity depends on the measured physical quantity, or this CT is not loaded, but a film can be before it whose parameters depend on the measured physical quantity, then the temporal position of the obtained peaks and the ratio of amplitudes of these peaks are determined, that are proportional to the square of the reflection coefficient SAW from the CT, and also to the doubled attenuation of the SAW under the film, if it is located in front of the reflective CT, and the distance between the secondarily reflected SAW pulses is doubled.

EFFECT: increasing the accuracy of measuring physical quantities by taking into account secondary reflections of surface acoustic waves.

2 cl, 14 dwg